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Patent Searching and Data


Title:
ROLL COATING METHOD FOR LIQUID MATERIAL
Document Type and Number:
WIPO Patent Application WO/2023/184884
Kind Code:
A1
Abstract:
Disclosed in the present invention is a roll coating method for a liquid material, which method comprises: roll coating a silicon wafer with a liquid material by means of a liquid coating roller, and controlling the thickness of a liquid carried by the liquid coating roller by means of a liquid carrying roller; and arranging liquid blocking structures at the two ends of the liquid coating roller and/or the liquid carrying roller, so as to prevent the liquid material from flowing out from the two ends of the liquid coating roller and the liquid carrying roller by means of the liquid blocking structures. By means of the roll coating method for a liquid material of the present invention, a liquid material can be blocked to prevent same from flowing out from the two ends of a liquid coating roller and a liquid carrying roller, such that the liquid coating roller can more uniformly carry a liquid, and roll coating is thus more uniform; and the present invention can further measure the pressure applied to a silicon wafer by the liquid coating roller during roll coating.

Inventors:
PAN HAO (CN)
REN CHANGRUI (CN)
FU LIMING (CN)
Application Number:
PCT/CN2022/119036
Publication Date:
October 05, 2023
Filing Date:
September 15, 2022
Export Citation:
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Assignee:
CHANGZHOU SHICHUANG ENERGY CO LTD (CN)
International Classes:
B05C11/10; B05C1/02; H01L31/18
Foreign References:
CN114653522A2022-06-24
CN215141450U2021-12-14
CN105728257A2016-07-06
CN204672501U2015-09-30
JPH09108600A1997-04-28
CN202238539U2012-05-30
CN104209227A2014-12-17
Attorney, Agent or Firm:
SUZHOU MAMBO PATENT AGENCY (GENERAL PARTNERSHIP) (CN)
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