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Title:
ROLLER MOLD MANUFACTURING DEVICE AND MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2011/158714
Kind Code:
A1
Abstract:
A phenomenon where a rendered pattern becomes unclear due to rotational runout of a roller mold in the direction of a rotation axis is curbed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device (1) is provided with an electron beam radiation device (2); a mask (3) which has an opening that allows passage of some of electron beams, and which forms a plurality of electron beams that perform simultaneous rendering on a resist; a rotation drive device (4) which rotates a roller mold (100) around a rotation axis (8); a displacement amount sensor (5) which detects the rotational runout displacement amount of the roller mold (100) in the direction of the rotation axis (8); a control device (6); and an actuator (7) which, on the basis of a control signal from the control device (6), causes a position rendered by electron beams to follow the displacement of the roller mold (100) in the direction of the rotation axis (8). The roller mold manufacturing device (1) restricts misalignment of an exposed position of the resist, said misalignment being caused by rotational runout displacement of the roller mold (100) in the direction of the rotation axis (8).

Inventors:
ITO NAOTO (JP)
KITADA TOSHIO (JP)
KIGUCHIYA HIDENARI (JP)
Application Number:
PCT/JP2011/063149
Publication Date:
December 22, 2011
Filing Date:
June 08, 2011
Export Citation:
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Assignee:
ASAHI KASEI ENGINEERING CORP (JP)
ITO NAOTO (JP)
KITADA TOSHIO (JP)
KIGUCHIYA HIDENARI (JP)
International Classes:
B29C59/04; B29C33/38; G03F7/20
Foreign References:
JP2009274347A2009-11-26
JP2009288340A2009-12-10
JP2010156782A2010-07-15
JP2011118049A2011-06-16
JP2009274347A2009-11-26
Other References:
See also references of EP 2583813A4
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
Yoshiyuki Inaba (JP)
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Claims:



 
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