Title:
ROLLER-TYPE PRESSURIZING DEVICE, IMPRINT DEVICE, AND ROLLER-TYPE PRESSURIZING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/186736
Kind Code:
A1
Abstract:
Provided are: a roller-type pressurizing device in which it is possible to minimize unevenness in elastic deformation of the main roller and to uniformly pressurize a subject; an imprint device; and a roller-type pressurizing method. This invention, for pressurizing a subject such as a mold (1) and a molded item (2), comprises: a main roller (37) for pressing the subject, at least the surface of the main roller (37) being formed of an elastic member (37a); a roller movement means for moving the main roller (37) relative to the subject; a pressure adjustment unit for adjusting the pressure applied by the main roller (37) to the subject; a pressure reception stage (322) for receiving the pressure from the main roller (37) through the subject; an intermediate roller (38) for supporting the main roller (37), at least the surface of the intermediate roller (38) being formed of a material having a higher elastic modulus than that of the elastic member (37a); and a backup roller (39) for supporting the intermediate roller (38), the backup roller (39) having an axial length less than those of the main roller (37) and the intermediate roller (38).
Inventors:
KAWAGUCHI HIROSUKE (JP)
TANIGUCHI YUTAKA (JP)
TANAKA SATORU (JP)
SAITO YUKIMASA (JP)
SUGIYAMA MASAKI (JP)
MATONO DAISUKE (JP)
TANIGUCHI YUTAKA (JP)
TANAKA SATORU (JP)
SAITO YUKIMASA (JP)
SUGIYAMA MASAKI (JP)
MATONO DAISUKE (JP)
Application Number:
PCT/JP2015/066026
Publication Date:
December 10, 2015
Filing Date:
June 03, 2015
Export Citation:
Assignee:
SCIVAX CORP (JP)
International Classes:
H01L21/027; B29C59/04
Domestic Patent References:
| WO2014088107A1 | 2014-06-12 | |||
| WO2004062886A1 | 2004-07-29 | |||
| WO2013191206A1 | 2013-12-27 |
Foreign References:
| JPH02120861A | 1990-05-08 | |||
| JPH0269745A | 1990-03-08 | |||
| JPH01217346A | 1989-08-30 | |||
| JP2005178368A | 2005-07-07 | |||
| JP2006326948A | 2006-12-07 | |||
| JPH02282254A | 1990-11-19 | |||
| JP2014172331A | 2014-09-22 |
Other References:
See also references of EP 3032573A4
Attorney, Agent or Firm:
OKUDA Noritsugu (JP)
Okuda 律次 (JP)
Okuda 律次 (JP)
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