Title:
ROTARY DEVICE AND SPRAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/189116
Kind Code:
A1
Abstract:
This rotary device comprises: a rotary stage which detachably supports a base material having an inlet and an outlet for a liquid having a predetermined temperature, and a flow path connecting the inlet to the outlet; a rotary support which supports a rotary table; a rotary mechanism which rotates the rotary support; and a liquid supply part which supplies the liquid to the base material. The rotary stage has a liquid supply port for supplying the liquid to the base material, and a liquid discharge port for discharging the liquid from the base material. The rotary support has therein a first pipe connected to the liquid supply port, and a second pipe connected to the liquid discharge port. In addition, this spray device comprises the rotary device and a spray gun.
Inventors:
HIRANO SATOSHI (JP)
TAKAHARA GO (JP)
NAMBU TAKATOSHI (JP)
KANEDA NORIYOSHI (JP)
YOKOYAMA HIBIKI (JP)
SONE MICHIYOSHI (JP)
TAKAHARA GO (JP)
NAMBU TAKATOSHI (JP)
KANEDA NORIYOSHI (JP)
YOKOYAMA HIBIKI (JP)
SONE MICHIYOSHI (JP)
Application Number:
PCT/JP2023/007341
Publication Date:
October 05, 2023
Filing Date:
February 28, 2023
Export Citation:
Assignee:
NHK SPRING CO LTD (JP)
International Classes:
C23C4/12
Foreign References:
| JPH06306570A | 1994-11-01 | |||
| JP2019519098A | 2019-07-04 | |||
| JP2017069429A | 2017-04-06 | |||
| US20070045001A1 | 2007-03-01 |
Attorney, Agent or Firm:
TAKAHASHI, HAYASHI AND PARTNER PATENT ATTORNEYS, INC. (JP)
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