Title:
ROTATABLE ELECTROCHEMICAL ETCHING CELL
Document Type and Number:
WIPO Patent Application WO/2024/072691
Kind Code:
A3
Abstract:
The present disclosure provides a reaction chamber, and methods of using the same, wherein the reaction chamber includes a mesh cathode, a first anode, a second anode, and a reaction chamber body, wherein the reaction chamber body is hollow and has a first opening and a second opening, where semiconductor wafers to be electrochemically etched can be sealed. One benefit of the reaction chamber and methods disclosed herein can be allowing for numerous etching operations to be performed with minimal or no contact of the operator with the etching solution, such as hydrofluoric acid.
Inventors:
LIU XUEWU (US)
BHAVE GAURI (US)
BHAVE GAURI (US)
Application Number:
PCT/US2023/033412
Publication Date:
May 16, 2024
Filing Date:
September 21, 2023
Export Citation:
Assignee:
METHODIST HOSPITAL (US)
International Classes:
C25F3/12; B01J8/00; B01J19/08; F16J15/3268; H01L21/306; H01L21/465; H01M4/66; H01M4/74
Attorney, Agent or Firm:
CHILDS, William R. (US)
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