Title:
SAMPLE HOLDER AND ANALYSIS SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/244055
Kind Code:
A1
Abstract:
Provided is a sample holder with high versatility. A sample holder 100 includes: a holder shaft 2; a placement part 3 on which a sample SAM can be placed; a movement mechanism 4 for moving the holder shaft in a first direction; a rotation mechanism 5 for rotating the holder shaft 2 in a first rotation direction where the center of the holder shaft 2 is a rotation axis; a protruding part 6 that is fixed to the holder shaft 2 so as to protrude in a second direction crossing the first direction, the position of the protruding part changing in accordance with the rotation and the movement of the holder shaft 2; and a guide part 7 that surrounds a periphery of the holder shaft 2, the position of the guide part not changing in accordance with the rotation and the position of the holder shaft 2. A through-hole (7a) and a through-hole (7b) are provided on the guide part 7. The width of the through-hole (7a) in the first rotation direction is greater than the width of the through-hole (7a) in the first rotation direction. The protruding part 6 is capable of moving in the through-hole (7a) and in the through-hole (7b).
Inventors:
ASAKURA HIROYUKI (JP)
KIKUCHI HIDEKI (JP)
YAGUCHI TOSHIE (JP)
KIKUCHI HIDEKI (JP)
YAGUCHI TOSHIE (JP)
Application Number:
PCT/JP2021/018607
Publication Date:
November 24, 2022
Filing Date:
May 17, 2021
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20
Foreign References:
| JP2014089936A | 2014-05-15 | |||
| JP2016100119A | 2016-05-30 | |||
| JP2015018645A | 2015-01-29 | |||
| JP2011090973A | 2011-05-06 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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