Title:
SAMPLE HOLDER AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/240655
Kind Code:
A1
Abstract:
Provided is a sample holder (HL) capable of efficiently applying pressure to the observation surface of a sample (SAM). The sample holder (HL) has a fixed electrode (4b), a movable electrode (5) and a pressure-applying member (6) which is attached to the movable electrode (5) and has the function of moving the movable electrode (5) in the horizontal direction. When the sample (SAM) is held between the lateral surface of the fixed electrode (4b) and the lateral surface of the movable electrode (5), the upper surface of the sample (SAM) is positioned within the range of the width of the pressure-applying member (6) in the Z-direction in the area at which the pressure-applying member (6) contacts the movable electrode (5).
Inventors:
HANEDA SHIGERU (JP)
AZUMA JUNZO (JP)
AZUMA JUNZO (JP)
Application Number:
PCT/JP2019/020877
Publication Date:
December 03, 2020
Filing Date:
May 27, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/20
Foreign References:
| JP2017139175A | 2017-08-10 | |||
| JP2016207425A | 2016-12-08 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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