Title:
SAMPLE HOLDER, METHOD FOR USING SAMPLE HOLDER, PROJECTION AMOUNT ADJUSTMENT JIG, PROJECTION AMOUNT ADJUSTMENT METHOD AND CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/059401
Kind Code:
A1
Abstract:
The present invention improves the performance of a sample holder 1 to be used in a charged particle beam device. A shielding plate 2 is connected to a sample stage 7. The sample stage 7 is provided with rod-shaped pressing members 5 which are capable of moving in a direction perpendicular to the shielding plate 2 while being in a state of attachment to the sample stage 7. A sample support member 4 which is connected to the pressing members 5 is provided in a location which faces the shielding plate 2. Springs 6 are provided along the outer circumference of the pressing members 5 and are connected to the sample support member 4 and to the sample stage 7.
Inventors:
NAKAMURA MEGUMI (JP)
TAKASU HISAYUKI (JP)
HORINOUCHI KENTO (JP)
TAKASU HISAYUKI (JP)
HORINOUCHI KENTO (JP)
Application Number:
PCT/JP2019/037631
Publication Date:
April 01, 2021
Filing Date:
September 25, 2019
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/305; H01J37/20
Foreign References:
| JP2019003732A | 2019-01-10 | |||
| JP2012154846A | 2012-08-16 |
Attorney, Agent or Firm:
TSUTSUI & ASSOCIATES (JP)
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