Title:
SCANNING ELECTRON MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2021/068736
Kind Code:
A1
Abstract:
Disclosed in the present application is a scanning electron microscope, comprising: an electron optical tube, used to generate an electron beam, and focus the electron beam on a sample; a first probe, used to receive electrons generated from the electron beam acting on the sample; and a second probe, used to receive photons generated from the electron beam acting on the sample. The second probe comprises a reflector and an optical detector, the reflector being of an annular shape and covering the sample on all sides, and the reflector reflecting the photons generated from the sample onto the optical detector. The scanning electron microscope of the present application allows for broad collection of photons, and the optical detector has a high reception rate.
Inventors:
LIU SHA (CN)
HE WEI (CN)
HE WEI (CN)
Application Number:
PCT/CN2020/116599
Publication Date:
April 15, 2021
Filing Date:
September 21, 2020
Export Citation:
Assignee:
FOCUS EBEAM TECH BEIJING CO LTD (CN)
International Classes:
H01J37/28
Foreign References:
| CN106525845A | 2017-03-22 | |||
| JP2014143348A | 2014-08-07 | |||
| EP0254128A2 | 1988-01-27 | |||
| EP2698805A1 | 2014-02-19 |
Attorney, Agent or Firm:
CHINA PAT INTELLECTUAL PROPERTY OFFICE (CN)
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