Title:
SCANNING MECHANISM AND SCANNING PROBE MICROSCOPE
Document Type and Number:
WIPO Patent Application WO/2014/024685
Kind Code:
A1
Abstract:
A scanning mechanism (10) has: a fixed frame (11); an XY stage (19) that is disposed in the fixed frame (11); and piezoelectric elements (12A, 12B, 12C) that are disposed between the XY stage (19) and the fixed frame (11). The XY stage (19) has an XY movable section (14) that can move in the X axis direction and the Y axis direction. The piezoelectric elements (12A, 12B, 12C) constitute an XY actuator in the X axis direction and the Y axis direction, in which the XY movable section (14) is scanned, and the XY actuator is symmetric with respect to a straight line, which passes the gravity center of the XY movable section (14), and which is parallel to the Y axis direction, and the XY actuator is asymmetric with respect to a straight line, which passes the gravity center of the XY movable section (14), and which is parallel to the X axis direction.
Inventors:
SAKAI NOBUAKI (JP)
UEKUSA YOSHITSUGU (JP)
UEKUSA YOSHITSUGU (JP)
Application Number:
PCT/JP2013/070104
Publication Date:
February 13, 2014
Filing Date:
July 24, 2013
Export Citation:
Assignee:
OLYMPUS CORP (JP)
International Classes:
G01Q10/04; G01Q20/02
Foreign References:
| JP2002082036A | 2002-03-22 | |||
| JPH0460402A | 1992-02-26 | |||
| JP2010190657A | 2010-09-02 | |||
| JP2000056035A | 2000-02-25 |
Attorney, Agent or Firm:
KURATA, Masatoshi et al. (JP)
Masatoshi Kurata (JP)
Masatoshi Kurata (JP)
Download PDF:
Previous Patent: TEMPERATURE SWITCH AND FLUID HEATING DEVICE
Next Patent: TWO-PACK TYPE CURABLE COATING AGENT
Next Patent: TWO-PACK TYPE CURABLE COATING AGENT