Title:
SCANNING-TYPE REDUCTION PROJECTION OPTICAL SYSTEM AND LASER MACHINING APPARATUS USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/002555
Kind Code:
A1
Abstract:
In the present invention, by a scanning-type reduction projection optical system for forming an image from transverse multimode pulsed laser light in a micro-sized area on a donor substrate via a lens array-type zoom homogenizer, an array mask 10, a scanning mirror 4, a photomask 6, and a telecentric projection lens 8, LIFT is performed with high positional accuracy on a receptor substrate that faces a microelement on the donor substrate. As the implementation process thereof, the steps of inspection for acquiring position information, LIFT area division, irradiation position selection, transfer, and stage movement are carried out. Through this configuration it is possible to provide a scanning-type reduction projection optical system whereby a minute irradiation area that is uniform and has an energy distribution devoid of variations can be scanned in a wide range with high precision at high speed while compensating for inadequacy in scanner precision, without the use of a large-aperture, expensive fθ lens or telecentric reduction projection lens, and a LIFT device or the like for packaging or transfer that is equipped with the scanning-type reduction projection optical system, and also to provide an implementation method for the scanning-type reduction projection optical system.
Inventors:
YAMAOKA HIROSHI (JP)
NAKADA SATOKI (JP)
USAMI TAKETO (JP)
NAKADA SATOKI (JP)
USAMI TAKETO (JP)
Application Number:
PCT/JP2021/027082
Publication Date:
January 26, 2023
Filing Date:
July 20, 2021
Export Citation:
Assignee:
SHINETSU CHEMICAL CO (JP)
International Classes:
B23K26/00
Domestic Patent References:
| WO2019244362A1 | 2019-12-26 |
Foreign References:
| JP2021151666A | 2021-09-30 | |||
| JP2015534903A | 2015-12-07 | |||
| JP2006309994A | 2006-11-09 | |||
| JP2008110384A | 2008-05-15 | |||
| JP2018027551A | 2018-02-22 | |||
| JP2012123127A | 2012-06-28 | |||
| JP2020004478A | 2020-01-09 | |||
| JP2006041500A | 2006-02-09 |
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
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