SCHEDULE PREPARATION METHOD FOR SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING DEVICE

WIPO Patent Application WO/2015/198885

A1

This substrate processing method is a method for preparing a schedule for chronologically defining the operation of a substrate processing device, and is for use in a schedule preparation unit that is provided to a substrate processing device comprising at least one single-substrate processing unit that processes one substrate at a time and a control unit for controlling the processing unit. The method includes a schedule preparation step in which a schedule is prepared for a substrate by chronologically arranging a plurality of blocks that define the content of an operation to be performed on each of a plurality of substrates by the substrate processing device. The schedule preparation step includes a high load prevention arrangement step in which, when preparing a schedule for a plurality of substrates, blocks corresponding to a high load operation that is an operation in which a high control load occurs at least temporarily in the control unit are arranged on a temporal axis such that high load time slots that are time slots during which a high control load occurs in the control unit are not grouped together.

YAMANAKA SATOSHI (JP)

PCT/JP2015/066901

December 30, 2015

June 11, 2015

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SCREEN HOLDINGS CO LTD (JP)

H01L21/02; G05B19/418; H01L21/304

JP2006230146A	2006-08-31
JP2003100576A	2003-04-04
JP2010161164A	2010-07-22
JP2010217945A	2010-09-30

INAOKA, Kosaku et al. (JP)
Kosaku Inaoka (JP)

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