Title:
SEALING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO/2019/177047
Kind Code:
A1
Abstract:
The present invention enables sealing of a housing even in the case where a frame member and a cover member are not of high rigidity. An EFEM is configured to have a pressure difference of not more than a prescribed value between an interior space 40 and an exterior space 7 of a housing. The housing has: a frame member that is assembled so as to have an opening formed therein; a cover member that is attached to the frame member so as to cover the opening; and a seal member 61 that is sandwiched between the frame member and the cover member and that extends so as to surround the opening. The frame member and the cover member are made of a sheet metal. The seal member 61 is an elastic member wherein a cross-section in a direction orthogonal to the extension direction of the seal member 61 is formed in a hollow shape.
Inventors:
KAWAI TOSHIHIRO (JP)
OGURA GENGORO (JP)
OGURA GENGORO (JP)
Application Number:
PCT/JP2019/010351
Publication Date:
September 19, 2019
Filing Date:
March 13, 2019
Export Citation:
Assignee:
SINFONIA TECHNOLOGY CO LTD (JP)
International Classes:
F16J15/10; H01L21/02; H01L21/677
Foreign References:
| JP2010084927A | 2010-04-15 | |||
| JP2014232078A | 2014-12-11 | |||
| JP2010276620A | 2010-12-09 | |||
| JP2013170956A | 2013-09-02 | |||
| JP2010256311A | 2010-11-11 | |||
| JP2015146349A | 2015-08-13 | |||
| JP2007046657A | 2007-02-22 | |||
| JP2016137151A | 2016-08-04 |
Attorney, Agent or Firm:
KAJI, SUHARA & ASSOCIATES (JP)
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