Title:
SELECTOR BASED ON TRANSITION METAL OXIDE AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2018/152697
Kind Code:
A1
Abstract:
A preparation method for a selector based on a transition metal oxide and a selector prepared by the method. The preparation method comprises: S1, forming a tungsten plug on a transistor; S2, using the tungsten plug as a lower electrode, and preparing a transition metal layer on the tungsten plug; S3, oxidizing the transition metal layer to transform same into a transition metal oxide layer; and S4, depositing an upper electrode on the transition metal oxide, and patterning the upper electrode and the transition metal oxide. The selector of the present invention can provide higher current density and has good uniformity. A 1S1R structure formed can effectively restrain crosstalk in a resistive random access memory array, and can effectively improve the storage density and the integration level of a device without any increase in the area of a storage unit. In addition, the selector for resistive random access memories of the present invention has advantages such as a simple structure, easy integration, low costs, good uniformity, and compatibility with CMOS technology.
Inventors:
LV HANGBING (CN)
LUO QING (CN)
XU XIAOXIN (CN)
LONG SHIBING (CN)
LIU QI (CN)
LIU MING (CN)
LUO QING (CN)
XU XIAOXIN (CN)
LONG SHIBING (CN)
LIU QI (CN)
LIU MING (CN)
Application Number:
PCT/CN2017/074401
Publication Date:
August 30, 2018
Filing Date:
February 22, 2017
Export Citation:
Assignee:
INST OF MICROELECTRONICS CAS (CN)
International Classes:
H01L45/00; H01L27/02; H01L27/24
Domestic Patent References:
| WO2016048330A1 | 2016-03-31 |
Foreign References:
| CN1641882A | 2005-07-20 | |||
| CN101068039A | 2007-11-07 | |||
| CN102683584A | 2012-09-19 |
Other References:
QING LUO ET AL.: "Fully BEOL Compatible TaOx-based Selector with High Unifor- mity and Robust Performance", 2016 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM, 7 December 2016 (2016-12-07), XP033054963, ISSN: 2156-017X
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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