Title:
A SELF-IMAGEABLE FILM FORMING POLYMER, COMPOSITIONS THEREOF AND DEVICES AND STRUCTURES MADE THEREFROM
Document Type and Number:
WIPO Patent Application WO/2011/002516
Kind Code:
A9
Abstract:
Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.
Inventors:
ONISHI OSAMU (JP)
IKEDA HARUO (JP)
RHODES LARRY (US)
EVANS PAUL J (US)
ELCE EDMUND (US)
BELL ANDREW (US)
BRICK CHAD (US)
NG HENDRA (US)
KANDANARACHCHI PRAMOD (US)
IKEDA HARUO (JP)
RHODES LARRY (US)
EVANS PAUL J (US)
ELCE EDMUND (US)
BELL ANDREW (US)
BRICK CHAD (US)
NG HENDRA (US)
KANDANARACHCHI PRAMOD (US)
Application Number:
PCT/US2010/001887
Publication Date:
August 11, 2011
Filing Date:
July 01, 2010
Export Citation:
Assignee:
PROMERUS LLC (US)
SUMITOMO BAKELITE CO (JP)
ONISHI OSAMU (JP)
IKEDA HARUO (JP)
RHODES LARRY (US)
EVANS PAUL J (US)
ELCE EDMUND (US)
BELL ANDREW (US)
BRICK CHAD (US)
NG HENDRA (US)
KANDANARACHCHI PRAMOD (US)
SUMITOMO BAKELITE CO (JP)
ONISHI OSAMU (JP)
IKEDA HARUO (JP)
RHODES LARRY (US)
EVANS PAUL J (US)
ELCE EDMUND (US)
BELL ANDREW (US)
BRICK CHAD (US)
NG HENDRA (US)
KANDANARACHCHI PRAMOD (US)
International Classes:
C08G59/32; C08G61/02; C08G61/06; G03F7/038
Attorney, Agent or Firm:
BERMAN, Bernard (9921 Brecksville RoadBrecksville, OH, US)
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