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Title:
SEMICONDUCTOR DEVICE AND CAPACITANCE VALUE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2019/220839
Kind Code:
A1
Abstract:
This semiconductor device comprises: a ring oscillator that includes a plurality of gate circuits disposed on a circuit path and having a first gate circuit, and that includes a first load circuit having a first capacitance element which is connected to an output terminal of the first gate circuit and which can be set to active or inactive on the basis of a first control signal; and a control signal generating circuit that can generate the first control signal.

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Inventors:
MORI SHIGETAKA (JP)
Application Number:
PCT/JP2019/016253
Publication Date:
November 21, 2019
Filing Date:
April 16, 2019
Export Citation:
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Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
G01R31/28; G01R27/26; H01L21/66; H01L21/822; H01L27/04; H03K3/03; H03K3/354
Foreign References:
JPH11186880A1999-07-09
JP2018029256A2018-02-22
JP2005302839A2005-10-27
JP2001006400A2001-01-12
JP2013007691A2013-01-10
US6728647B12004-04-27
JP2009025043A2009-02-05
JP2007037097A2007-02-08
Attorney, Agent or Firm:
TSUBASA PATENT PROFESSIONAL CORPORATION (JP)
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