Title:
SEMICONDUCTOR DEVICE, SOLAR CELL, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/190142
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a semiconductor device, a solar cell, and a method for manufacturing a semiconductor device, wherein cost reduction can be achieved with a simple configuration. A semiconductor device resolving the problem comprises: a crystalline silicon layer 10 having a first surface and a second surface on the reverse side from the first surface; a titanium oxide film 11 disposed in contact with the first surface or the second surface of the crystalline silicon layer 10; and a metal electrode 14 disposed in contact with the surface of the titanium oxide film and serving as a positive electrode. In addition, a semiconductor device manufacturing method resolving the problem comprises the steps of: forming a titanium oxide film 11 on a crystalline silicon layer 10; subjecting the titanium oxide film 11 to a hydrogen plasma treatment; and forming a metal electrode 14 as a positive electrode directly on the surface of the titanium oxide film 11.
Inventors:
MATSUI TAKUYA (JP)
SAI HITOSHI (JP)
SAI HITOSHI (JP)
Application Number:
PCT/JP2023/011781
Publication Date:
October 05, 2023
Filing Date:
March 24, 2023
Export Citation:
Assignee:
AIST (JP)
International Classes:
H01L31/074
Domestic Patent References:
| WO2021010127A1 | 2021-01-21 |
Foreign References:
| CN112151626A | 2020-12-29 |
Attorney, Agent or Firm:
WASHIDA & ASSOCIATES (JP)
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