Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/068940
Kind Code:
A1
Abstract:
A semiconductor device (100), comprising a preheating cavity (140). The preheating cavity (140) comprises: a housing (140a); a heater (142) provided at the bottom of the housing (140a) to place a substrate (144); an electrode (149) provided at the top of the housing (140a) and located above the substrate (144); and a lifting and rotating mechanism (146) connected to the electrode (149).
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Inventors:
CHEN WEIJUN (CN)
Application Number:
PCT/CN2021/122443
Publication Date:
April 07, 2022
Filing Date:
September 30, 2021
Export Citation:
Assignee:
SHENZHEN JING XIANG TECH CO LTD (CN)
International Classes:
C23C16/54; C23C14/06; C23C14/50; C23C14/56; C23C16/34; C23C16/455; C23C16/458; C23C16/505; H01L21/02
Foreign References:
| CN110643934A | 2020-01-03 | |||
| CN110060944A | 2019-07-26 | |||
| CN104862652A | 2015-08-26 | |||
| US5070228A | 1991-12-03 |
Attorney, Agent or Firm:
SHENZHEN JINGZHI INTELLECTUAL PROPERTY AGENCY CO. LTD (CN)
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