Title:
SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/210052
Kind Code:
A1
Abstract:
This semiconductor device comprises: a semiconductor chip having a main surface; and a main transistor including a first system transistor and a second system transistor formed on the main surface so as to be individually controlled. The first system transistor includes a first composite cell composed of α (α≥2)-number of first unit transistors that are adjacently arranged on the main surface and that each have a first trench structure including a first electrode embedded in a first trench formed on the main surface. The second system transistor includes a second composite cell disposed adjacent to the first composite cell and composed of β (β≥2)-number of second unit transistors that are adjacently arranged on the main surface and that each have a second trench structure including a second electrode embedded in a second trench formed on the main surface.
Inventors:
OKUDA HAJIME (JP)
FUKUDA YOSHINORI (JP)
OSUMI YUJI (JP)
FUKUDA YOSHINORI (JP)
OSUMI YUJI (JP)
Application Number:
PCT/JP2022/012840
Publication Date:
October 06, 2022
Filing Date:
March 18, 2022
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
H01L21/822; H01L21/336; H01L21/76; H01L21/8234; H01L27/04; H01L27/06; H01L27/088; H01L29/78
Foreign References:
| JP2021044578A | 2021-03-18 | |||
| JP2019192693A | 2019-10-31 | |||
| JPS6457674A | 1989-03-03 | |||
| JP2008507841A | 2008-03-13 |
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (JP)
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