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Title:
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/029280
Kind Code:
A1
Abstract:
A standard cell (1) constituting a semiconductor integrated circuit device is provided with a plurality of fins (11, 12, 13, 14), which extend in the first direction, and which are aligned with each other in the second direction perpendicular to the first direction. Active fins (11, 12) constitute an active transistor. Dummy fins (13, 14) are disposed between the active fins (11, 12) and an end of the standard cell (1).

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Inventors:
SHIMBO HIROYUKI
Application Number:
PCT/JP2014/002236
Publication Date:
March 05, 2015
Filing Date:
April 21, 2014
Export Citation:
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Assignee:
PANASONIC CORP (JP)
International Classes:
H01L21/82; H01L21/822; H01L21/8238; H01L27/04; H01L27/092
Domestic Patent References:
WO2008059440A22008-05-22
WO2011077664A12011-06-30
Foreign References:
JP2010016258A2010-01-21
JP2010040630A2010-02-18
JP2009218499A2009-09-24
Attorney, Agent or Firm:
MAEDA & PARTNERS (JP)
Patent business corporation MAEDA PATENT OFFICE (JP)
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