Title:
SEMICONDUCTOR MANUFACTURING PART INCLUDING BORON CARBIDE PLASMA-RESISTANCE MEMBER
Document Type and Number:
WIPO Patent Application WO/2024/010100
Kind Code:
A1
Abstract:
The present invention relates to a semiconductor manufacturing part including a boron carbide plasma-resistance member. An aspect of the present invention provides a semiconductor manufacturing part which includes boron carbide formed by chemical vapor deposition (CVD), a preferred growth peak in X-ray diffractometry corresponds to (021) plane, and the boron carbide includes 20-60 atomic% of carbon (C).
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Inventors:
SEO JIN WON (KR)
Application Number:
PCT/KR2022/009573
Publication Date:
January 11, 2024
Filing Date:
July 04, 2022
Export Citation:
Assignee:
TOKAI CARBON KOREA CO LTD (KR)
International Classes:
H01J37/32; C23C4/10; C23C16/44
Foreign References:
| KR102216815B1 | 2021-02-18 | |||
| KR102201523B1 | 2021-01-13 | |||
| JP2010195669A | 2010-09-09 | |||
| KR20200032060A | 2020-03-25 | |||
| KR20180093814A | 2018-08-22 |
Attorney, Agent or Firm:
MUHANN PATENT & LAW FIRM (KR)
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