Title:
SEMICONDUCTOR PROCESS APPARATUS AND BEARING DEVICE THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/246561
Kind Code:
A1
Abstract:
The present application relates to the semiconductor process technology. Disclosed in the present application are a semiconductor process apparatus and a bearing device therefor. The bearing device for the semiconductor process apparatus comprises: a base, which comprises a first surface and a second surface, wherein the first surface is used for bearing a wafer, the second surface has a height smaller than that of the first surface, and the second surface is arranged around the first surface; a deposition ring, which comprises an upper surface provided with an annular groove and a lower surface overlying the second surface; and a cover ring, wherein an outer ring portion of the cover ring is supported on a lining of a reaction cavity of the semiconductor process apparatus, an inner ring portion of the cover ring covers an outer ring portion of the deposition ring, and two surfaces, which are opposite each other, between the inner ring portion of the cover ring and the outer ring portion of the deposition ring are provided with a plurality of annular protrusions and a plurality of annular recesses, such that a labyrinth channel is formed between the joint between the cover ring and the deposition ring, and the annular groove. The bearing device of the present application can effectively reduce the probability of adhesion between the cover ring and the deposition ring in the process of a semiconductor process treatment.
Inventors:
JI KEHONG (CN)
LI DONGDONG (CN)
LI DONGDONG (CN)
Application Number:
PCT/CN2023/099884
Publication Date:
December 28, 2023
Filing Date:
June 13, 2023
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
C23C14/50; C23C14/35; H01J37/34; H01L21/687
Foreign References:
| CN115074690A | 2022-09-20 | |||
| CN109023287A | 2018-12-18 | |||
| CN207176067U | 2018-04-03 | |||
| CN113322440A | 2021-08-31 | |||
| CN208308944U | 2019-01-01 | |||
| US20090050272A1 | 2009-02-26 | |||
| US20120042825A1 | 2012-02-23 |
Attorney, Agent or Firm:
TEE & HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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