Title:
SEMICONDUCTOR PROCESS DEVICE AND IMPEDANCE MATCHING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/051598
Kind Code:
A1
Abstract:
Disclosed in the embodiments of the present application are a semiconductor process device and an impedance matching method therefor, which are used to solve the problem of relatively low impedance matching efficiency in existing semiconductor process procedures. The method comprises: a process preparation step, involving: acquiring the currently stored impedance matching data corresponding to a process starting step, wherein the impedance matching data comprises a parameter adjustment bit corresponding to a parameter adjustable device in an impedance matcher of a semiconductor process device, and adjusting a parameter value of the parameter adjustable device according to the parameter adjustment bit; and the process starting step, involving: loading a radio-frequency power to a process chamber of the semiconductor process device by means of the impedance matcher, and also performing impedance matching by means of the impedance matcher, and determining the current parameter adjustment bit of the parameter adjustable device when impedance matching is achieved, and updating the impedance matching data according to the current parameter adjustment bit. By means of the technical solution, a parameter value of a parameter adjustable device can be accurately and automatically adjusted according to a parameter adjustment bit in impedance matching data, thereby shortening the impedance matching time, and improving the impedance matching efficiency.
Inventors:
LI WENQING (CN)
WEI GANG (CN)
YANG JING (CN)
JIANG SHUQI (CN)
ZHANG DI (CN)
WEI GANG (CN)
YANG JING (CN)
JIANG SHUQI (CN)
ZHANG DI (CN)
Application Number:
PCT/CN2022/122085
Publication Date:
April 06, 2023
Filing Date:
September 28, 2022
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
H01J37/32
Foreign References:
| CN113921366A | 2022-01-11 | |||
| CN101964295A | 2011-02-02 | |||
| CN105206544A | 2015-12-30 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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