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Title:
SEMICONDUCTOR STRUCTURE
Document Type and Number:
WIPO Patent Application WO/2022/160594
Kind Code:
A1
Abstract:
A semiconductor structure comprises: a pad structure, located above a substrate; and a capacitor structure, located between the substrate and the pad structure and arranged opposite the pad structure, and comprising at least two capacitor units that are connected in parallel and spaced apart, each capacitor unit comprising at least one capacitor device.

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Inventors:
WANG LIN (CN)
Application Number:
PCT/CN2021/103636
Publication Date:
August 04, 2022
Filing Date:
June 30, 2021
Export Citation:
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Assignee:
CHANGXIN MEMORY TECH INC (CN)
International Classes:
H01L27/08
Foreign References:
CN112908994A2021-06-04
US20120161217A12012-06-28
US20050121744A12005-06-09
US20060237726A12006-10-26
US20200013434A12020-01-09
CN110970387A2020-04-07
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
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