Title:
SEMICONDUCTOR TESTING DEVICE AND SEMICONDUCTOR TESTING METHOD
Document Type and Number:
WIPO Patent Application WO/2016/035388
Kind Code:
A1
Abstract:
The present invention is provided with: a data holding unit 5b that holds correlation data with respect to an inter-terminal voltage needed to carry a constant current I0 when the temperature of a semiconductor element 91 is a variable; a data gathering unit 4 that gathers actual measurement data of inter-terminal voltages obtained when carrying the constant current I0 to a semiconductor element 91 in a power cycle test; and a temperature calculation unit 5a that calculates the temperature of the semiconductor element 91 on the basis of the actual measurement data gathered by means of the data gathering unit 4, and the correlation data held by means of the data holding unit 5b.
Inventors:
KINOUCHI SHINICHI (JP)
Application Number:
PCT/JP2015/063908
Publication Date:
March 10, 2016
Filing Date:
May 14, 2015
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01R31/26
Foreign References:
| JP2012098224A | 2012-05-24 | |||
| JPS5832177A | 1983-02-25 |
Attorney, Agent or Firm:
OIWA Masuo et al. (JP)
Masuo Oiwa (JP)
Masuo Oiwa (JP)
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