Title:
SEMICONDUCTOR WAFER CASSETTE POSITIONING AND DETECTION MECHANISM
Document Type and Number:
WIPO Patent Application WO1999036336
Kind Code:
A8
Abstract:
An apparatus for detecting the presence of wafer cassette, or pod, resting on an arrangement of pins allows cassette detection without interfering with insertion of a transport paddle arm. A cassette resides on an arrangement of beveled pins (24) which mate with corresponding receptacles (28) on the underside. Pins supporting the cassette have a spring (26) biased, hollow outer cylinder (20) coaxially mounted around a center post (22). A cassette places on the pins displaces the outer cylinder downward a sufficient distance to trigger a sensor. Upon removal of the cassette, the outer cylinder is displaced upwards, resetting the sensor.
Inventors:
BAZYDOLA KENNETH J
PRICE ROBERT L
PRICE ROBERT L
Application Number:
PCT/US1999/000415
Publication Date:
October 07, 1999
Filing Date:
January 07, 1999
Export Citation:
Assignee:
PRI AUTOMATION INC (US)
International Classes:
B65G49/07; H01L21/00; H01L21/677; H01L21/68; (IPC1-7): B65G49/07
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