Title:
SENSOR DEVICE FOR DIAGNOSING SEMICONDUCTOR PROCESS
Document Type and Number:
WIPO Patent Application WO/2022/092386
Kind Code:
A1
Abstract:
The present invention provides a sensor device for diagnosing a semiconductor process, the sensor device comprising: a lower case in which a seating groove is formed; a circuit board which is arranged in the seating groove with a plurality of electronic components having different heights mounted thereon; an upper case which has a plurality of insertion grooves having different heights and is bonded to the lower case such that the plurality of electronic components can be inserted in the plurality of insertion grooves; and an adhesive layer arranged between the seating groove and the plurality of insertion grooves, wherein the insertion grooves are formed to have different depths according to the heights of the plurality of electronic components.
Inventors:
JEON HO SEUNG (KR)
JO MUN SEONG (KR)
HWANG SEONG JOO (KR)
JANG RAE WON (KR)
JO MUN SEONG (KR)
HWANG SEONG JOO (KR)
JANG RAE WON (KR)
Application Number:
PCT/KR2020/015689
Publication Date:
May 05, 2022
Filing Date:
November 10, 2020
Export Citation:
Assignee:
EQCELL CO LTD (KR)
International Classes:
H01L21/66; H01J37/32; H01L21/67
Foreign References:
| KR20190066193A | 2019-06-13 | |||
| KR20180033572A | 2018-04-03 | |||
| KR20200038440A | 2020-04-13 | |||
| KR20060009885A | 2006-02-01 | |||
| US20110233546A1 | 2011-09-29 |
Attorney, Agent or Firm:
ERUUM & LEEON INTELLECTUAL PROPERTY LAW FIRM (KR)
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