Title:
SENSOR ELEMENT
Document Type and Number:
WIPO Patent Application WO/2020/066713
Kind Code:
A1
Abstract:
This sensor element (2) is equipped with: a ceramic laminate (20) having a zirconia layer portion (3) and two alumina layer portions (4a, 4b) provided on the two sides of the zirconia layer portion (3), respectively; and a plurality of electrodes (371-377) provided to the ceramic laminate (20). At least one of the two alumina layer portions (4a, 4b) includes a Ti element. The zirconia layer portion (3) has a layer including a Zr element and a Ti element near the interface with the at least one alumina layer portion, said layer including 0.05-5.0% by mass of the Ti element. This makes it possible to suppress warping in the ceramic laminate (20) of the sensor element (2).
Inventors:
UJIHARA KOUSUKE (JP)
FUJISAKI MEGUMI (JP)
TOMITA TAKAHIRO (JP)
FUJISAKI MEGUMI (JP)
TOMITA TAKAHIRO (JP)
Application Number:
PCT/JP2019/036196
Publication Date:
April 02, 2020
Filing Date:
September 13, 2019
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
C04B41/87; C04B37/00; G01N27/409; G01N27/41; G01N27/416; G01N27/419
Foreign References:
JP2006153703A | 2006-06-15 | |||
JP2013112595A | 2013-06-10 | |||
JP2002005875A | 2002-01-09 | |||
JP5198832B2 | 2013-05-15 |
Attorney, Agent or Firm:
MATSUSAKA, Masahiro et al. (JP)
Download PDF:
Previous Patent: INFORMATION PROCESSING DEVICE AND INFORMATION PROCESSING METHOD
Next Patent: SWITCH DEVICE
Next Patent: SWITCH DEVICE