Title:
SENSOR AND INSPECTION DEVICE USING THE SENSOR
Document Type and Number:
WIPO Patent Application WO/2005/096006
Kind Code:
A1
Abstract:
There are provided a sensor and an inspection device capable of detecting a reliable and effective detection signal when inspecting a substrate. Since an antenna MOS (1) is used as an antenna, it is possible to reduce the affect of impedance of a MOS transistor by electrically connecting the gate, the source, and the drain. The reference symbols 2, 3, 4 denote MOS’s constituting a switch circuit deciding whether to output a detection result of the antenna MOS (1) as an output signal. When no address signal is inputted, the MOS (4) is in the operation state and the state that no output signal is outputted is maintained. When an address signal is inputted, the gate input of the MOS (4) becomes “0” level and the MOS (4) is controlled to be in the non-operation state (OFF state). The gates of the MOS’s (2, 3) become “1” level and they enter the operation state (ON state). Accordingly, the detection result of the antenna MOS (1) is outputted as an output signal.
Inventors:
YOSHINAGA MASASHI (JP)
TANAKA TAKESHII (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
TANAKA TAKESHII (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
Application Number:
PCT/JP2005/006827
Publication Date:
October 13, 2005
Filing Date:
March 31, 2005
Export Citation:
Assignee:
OHT INC (JP)
YOSHINAGA MASASHI (JP)
TANAKA TAKESHII (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
YOSHINAGA MASASHI (JP)
TANAKA TAKESHII (JP)
YAMAOKA SHUJI (JP)
ISHIOKA SHOGO (JP)
International Classes:
G01R31/302; G01R31/28; H01L21/822; H01L27/04; (IPC1-7): G01R31/302
Foreign References:
| JP2003254706A | 2003-09-10 | |||
| JP2000055991A | 2000-02-25 |
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