Title:
SENSOR
Document Type and Number:
WIPO Patent Application WO/2024/048134
Kind Code:
A1
Abstract:
Provided is a sensor for use in a vaporizer, the sensor comprising: one or more sensor elements; a first flow path for delivering a fluid from the outside of the sensor to the positions of the sensor elements; and a second flow path for returning, to the outside of the sensor, the fluid delivered through the first flow path to the positions of the sensor elements. As the fluid, a non-gaseous fluid obtained by vaporizing a precursor using the vaporizer is used. The thus provided sensor is usable continuously for a long period of time at temperatures greater than the maximum operating temperature of the sensor elements included in the sensor. A portion of inert gas for purging the interior of a housing of the vaporizer may be used as the fluid. The sensor may further comprise a protective tube that is closed at one end and open at the other end, and the sensor elements may be disposed in the protective tube. In this case, the sensor elements are disposed in at least one of the first flow path or the second flow path. Preferably, at least one of a member composing the first flow path and a member composing the second flow path is composed of a material having a lower thermal conductivity than a member composing the protective tube.
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Inventors:
SASAKI AKIRA (JP)
Application Number:
PCT/JP2023/027172
Publication Date:
March 07, 2024
Filing Date:
July 25, 2023
Export Citation:
Assignee:
PROTERIAL LTD (JP)
International Classes:
G01F23/62
Foreign References:
| JP2021148496A | 2021-09-27 | |||
| JP2006208141A | 2006-08-10 | |||
| JPH02110830U | 1990-09-05 | |||
| JPH0391927U | 1991-09-19 | |||
| JPS5473310U | 1979-05-24 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
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