Title:
SEPARATING DEVICE AND SEPARATING METHOD
Document Type and Number:
WIPO Patent Application WO/2021/006092
Kind Code:
A1
Abstract:
Provided is a separating device for separating an object being processed into a first separated body and a second separated body, the separating device comprising: a first holding unit for holding the first separated body; a second holding unit for holding the second separated body; a moving unit for causing the first holding unit and the second holding unit to be moved relative to each other; and a pivoting unit which causes at least the first separated body or the second separated body to pivot so that a separation surface of the first separated body faces upward and a separation surface of the second separated body faces upward.
Inventors:
NAKANO SEIJI (JP)
YAMAWAKI YOHEI (JP)
KAWAGUCHI YOSHIHIRO (JP)
YAMAWAKI YOHEI (JP)
KAWAGUCHI YOSHIHIRO (JP)
Application Number:
PCT/JP2020/025506
Publication Date:
January 14, 2021
Filing Date:
June 29, 2020
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/02; H01L21/304; H01L21/677; H01L21/683
Domestic Patent References:
| WO2013136982A1 | 2013-09-19 | |||
| WO2019044530A1 | 2019-03-07 | |||
| WO2013058129A1 | 2013-04-25 | |||
| WO2012176629A1 | 2012-12-27 |
Attorney, Agent or Firm:
KANEMOTO, Tetsuo et al. (JP)
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