Title:
SERVICE ACTIVITY MANAGEMENT SYSTEM AND METHOD FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
Document Type and Number:
WIPO Patent Application WO2005091779
Kind Code:
A3
Abstract:
An activity management system, and a method of using thereof, is described for a service process in semiconductor manufacturing. The activity management system includes a data collection system configured to receive service activity data associated with at least one service component and a service operator, and relate the service activity data with at least one service account. Additionally, the activity management system includes a data storage system coupled to the data collection system and configured to store the service activity data. Furthermore, the activity management system includes a service action system coupled to the data collection system and the data storage system, and configured to perform at least one service function including service component repair, service component start-up, service component preventive maintenance, service component cleaning, service component revision (e.g., a field change notice), a service component enhancement (e.g., a continuous improvement notice), service component deinstallation, a customer action plan, a project action plan, and service education.
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Inventors:
KAUFFMAN ERIC (US)
BROWN PAUL (US)
BROWN PAUL (US)
Application Number:
PCT/US2005/003466
Publication Date:
April 27, 2006
Filing Date:
February 07, 2005
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
KAUFFMAN ERIC (US)
BROWN PAUL (US)
KAUFFMAN ERIC (US)
BROWN PAUL (US)
International Classes:
G06Q10/00; (IPC1-7): G06F17/60
Foreign References:
US6810406B2 | 2004-10-26 | |||
US4612620A | 1986-09-16 | |||
US5195173A | 1993-03-16 | |||
US5216612A | 1993-06-01 |
Other References:
See also references of EP 1735738A4
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