SHAPE MEASURING DEVICE AND METHOD

WIPO Patent Application WO/2018/066698

A1

This shape measuring device is provided with: a light source which radiates light having first and second wavelengths onto the surface of an object having reflectance factors with respect to the first and second wavelengths, via a medium having absorption coefficients at the first and second wavelengths; a sensor which receives light that has come from the surface of the object and has propagated through the medium, and which measures the intensities at the first and second wavelengths; and a measuring unit which calculates the distance from the surface of the medium to the surface of the object on the basis of the measured intensities at the first and second wavelengths, and on the basis of the absorption coefficients at the first and second wavelengths, and measures the shape of the object on the basis of the calculated distance. The first and second wavelengths are selected such that a difference between the intensity for a minimum distance at the first wavelength and the intensity for a maximum distance at the second wavelength is greater than a prescribed first value, and such that a difference between the reflectance factor at the first wavelength and the reflectance factor at the second wavelength is smaller than a prescribed second value.

SATO IMARI (JP)
ASANO YUTA (JP)
ZHENG YINQIANG (JP)
NISHINO KO (US)

PCT/JP2017/036510

April 12, 2018

October 06, 2017

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INTER UNIV RESEARCH INSTITUTE CORPORATION RESEARCH ORGANIZATION OF INFORMATION AND SYSTEMS (JP)
UNIV DREXEL (US)

G01B11/24

JP2016017919A	2016-02-01
JP2015057604A	2015-03-26
JP2016170164A	2016-09-23
CN105136062A	2015-12-09

SAMEJIMA, Mutsumi et al. (JP)

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