Title:
SHAPE MEASURING SYSTEM AND SHAPE MEASURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/170932
Kind Code:
A1
Abstract:
A shape of an object is measured with a high degree of accuracy. A shape measurement system comprises: a distance measuring head for irradiating an object with light and receiving light reflected from the object; a distance measuring device for generating a distance detection waveform on the basis of the reflected light; and a control device for analyzing the distance detection waveform and calculating a measured distance value to the object. The shape measurement system is characterized in that the control device calculates a feature amount of the distance detection waveform and performs at least one of a process of correcting an error in the measured distance value by substituting the feature amount into a correction formula and a process of performing a confidence weighting of an error in the measured distance value by substituting the feature amount into a confidence weighting formula.
Inventors:
HARIYAMA TATSUO (JP)
WATANABE MASAHIRO (JP)
TANIGUCHI ATSUSHI (JP)
MARUNO KENJI (JP)
YAZAKI AKIO (JP)
WATANABE MASAHIRO (JP)
TANIGUCHI ATSUSHI (JP)
MARUNO KENJI (JP)
YAZAKI AKIO (JP)
Application Number:
PCT/JP2020/005548
Publication Date:
August 27, 2020
Filing Date:
February 13, 2020
Export Citation:
Assignee:
HITACHI LTD (JP)
International Classes:
G01B11/24
Foreign References:
| JP2001013244A | 2001-01-19 | |||
| US20150022658A1 | 2015-01-22 | |||
| JP2009198460A | 2009-09-03 |
Attorney, Agent or Firm:
SHOYO INTELLECTUAL PROPERTY FIRM (JP)
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