Title:
SHEET-FED TREATING DEVICE
Document Type and Number:
WIPO Patent Application WO/2002/056357
Kind Code:
A1
Abstract:
A sheet-fed treating device, characterized by comprising a treatment container allowed to be vacuated, a loading table installed in the treatment container and loading a treated body thereon, an exhaust pipe connected to the bottom part of the treatment container and extending substantially downward linearly, a vacuum pump connected directly to the exhaust pipe, and a loading table support strut for supporting the loading table installed approximately at the center part of the exhaust pipe extendedly in the direction of the exhaust pipe.
Inventors:
IIZUKA HACHISHIRO (JP)
Application Number:
PCT/JP2002/000041
Publication Date:
July 18, 2002
Filing Date:
January 09, 2002
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
IIZUKA HACHISHIRO (JP)
IIZUKA HACHISHIRO (JP)
International Classes:
C23C14/50; C23C14/54; C23C16/44; C23C16/455; C23C16/458; H01J37/32; H01L21/00; H01L21/205; H01L21/22; H01L21/302; H01L21/3065; H01L21/324; (IPC1-7): H01L21/3065; C23C14/50; C23C16/44; H01L21/205; H01L21/22
Foreign References:
| JPH05267182A | 1993-10-15 | |||
| JPH0773997A | 1995-03-17 | |||
| JPH09326398A | 1997-12-16 | |||
| JPH0453126A | 1992-02-20 |
Other References:
See also references of EP 1357583A4
Attorney, Agent or Firm:
Yoshitake, Kenji (Fuji Bldg. 2-3 Marunouchi 3-chome Chiyoda-ku, Tokyo, JP)
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