SHEET-LIKE PROBE, METHOD OF PRODUCING THE PROBE, AND APPLICATION OF THE PROBE

Title:

SHEET-LIKE PROBE, METHOD OF PRODUCING THE PROBE, AND APPLICATION OF THE PROBE

Document Type and Number:

WIPO Patent Application WO/2005/103730

Kind Code:

A1

Abstract:

A sheet-like probe has a porous film, and in the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. The electrode structure bodies each composed of a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body for supporting the insulation layer.

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Inventors:

SATO KATSUMI (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)

Application Number:

PCT/JP2005/007935

Publication Date:

November 03, 2005

Filing Date:

April 26, 2005

Export Citation:

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Assignee:

JSR CORP (JP)
SATO KATSUMI (JP)
INOUE KAZUO (JP)
FUJIYAMA HITOSHI (JP)
YOSHIOKA MUTSUHIKO (JP)
IGARASHI HISAO (JP)

International Classes:

A63H17/045; A63H29/22; A63H30/00; A63H31/08; A63H30/04; A63H31/00; B60K17/16; F16H1/14; F16H1/20; F16H1/28; F16H48/08; G01R1/06; G01R1/073; G01R31/26; H01L21/06; H01L21/66; H01L51/50; H05B33/14; G01R1/067; G01R3/00; (IPC1-7): G01R1/06; G01R31/26; H01L21/66

Foreign References:

JP2002076074A	2002-03-15
JP2001208776A	2001-08-03
JP2003092317A	2003-03-28

Attorney, Agent or Firm:

Suzuki, Shunichiro (Gotanda Yamazaki Bldg. 6F 13-6, Nishigotanda 7-chom, Shinagawa-ku Tokyo 31, JP)

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