Title:
SHOWER HEAD AND VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/110013
Kind Code:
A1
Abstract:
[Problem] To make in-plane variation of plasma density uniform.
[Solution] A shower head according to an embodiment of the present invention is provided with a head body and a shower plate. The head body has an internal space. The shower plate comprises a plurality of gas ejection openings in communication with the internal space, a gas ejection surface at which gas is ejected via the plurality of gas ejection openings, and a plurality of holes disposed on the gas ejection surface. The shower plate is configured such that the surface area of the plurality of holes becomes greater in a stepwise manner radially from the center of the gas ejection surface.
Inventors:
JINBO YOSUKE (JP)
YAMAMOTO YOSHIAKI (JP)
CHATANI HIRONORI (JP)
NISHIKATA OSAMU (JP)
KIKUCHI TORU (JP)
YAMAMOTO YOSHIAKI (JP)
CHATANI HIRONORI (JP)
NISHIKATA OSAMU (JP)
KIKUCHI TORU (JP)
Application Number:
PCT/JP2017/033502
Publication Date:
June 21, 2018
Filing Date:
September 15, 2017
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
H01L21/31; C23C16/455; H01L21/3065; H01L21/318; H05H1/46
Foreign References:
| JP2011210797A | 2011-10-20 | |||
| JP2011071497A | 2011-04-07 | |||
| JP2012038682A | 2012-02-23 | |||
| US20160322200A1 | 2016-11-03 | |||
| JP2002237459A | 2002-08-23 |
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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