Title:
SHOWERHEAD FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT, AND METHOD FOR MANUFACTURING SAME
Document Type and Number:
WIPO Patent Application WO/2021/157798
Kind Code:
A1
Abstract:
The present invention relates to a showerhead for semiconductor manufacturing equipment, and a method for manufacturing same. The method for manufacturing the showerhead for semiconductor manufacturing equipment of the present invention, the showerhead having an upper plate, a lower plate, and a shaft connected to the upper plate, comprises: a raw material separate preparation step for separately preparing each of shaft raw material, upper plate raw material, and lower plate raw material, which are the respective raw materials of the shaft, the upper plate, and the lower plate; a primary molded material manufacturing by rotary friction welding step for, by integrally bonding the shaft raw material with the upper plate raw material by means of rotary friction welding, manufacturing primary molded material which has been molded into intermediate-step material; a secondary molded material processing step for, by using a predetermined processing process, processing the primary molded material into secondary molded material in which the upper plate and the shaft are integrated; a lower plate processing step for processing the lower plate by processing the lower plate raw material through the processing process; and a molded material and lower plate bonding step for manufacturing the showerhead by integrally bonding the secondary molded material with the lower plate.
Inventors:
CHO DUK HYUNG (KR)
Application Number:
PCT/KR2020/010695
Publication Date:
August 12, 2021
Filing Date:
August 12, 2020
Export Citation:
Assignee:
DONGWON PARTS CO LTD (KR)
International Classes:
B23P15/00; B23K20/12; B23P13/02; C21D9/08; C22C21/02; C22F1/043; H01L21/67
Foreign References:
| KR20180022582A | 2018-03-06 | |||
| KR20130123653A | 2013-11-13 | |||
| JP2016084256A | 2016-05-19 | |||
| US20140295580A1 | 2014-10-02 | |||
| KR20020048465A | 2002-06-24 |
Attorney, Agent or Firm:
LEE, Jung Hyun (KR)
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