SILICON-BASED OPTICAL COUPLING STRUCTURE, SILICON-BASED MONOLITHIC INTEGRATED OPTICAL DEVICE, AND MANUFACTURING METHOD THEREFOR - SHANGHAI INDUSTRIAL MTECHNOLOGY RES INSTITUTE

Title:

SILICON-BASED OPTICAL COUPLING STRUCTURE, SILICON-BASED MONOLITHIC INTEGRATED OPTICAL DEVICE, AND MANUFACTURING METHOD THEREFOR

Document Type and Number:

WIPO Patent Application WO/2021/000350

Kind Code:

A1

Abstract:

The present application provides a silicon-based optical coupling structure, a silicon-based monolithic integrated optical device, and a manufacturing method therefor. The silicon-based optical coupling structure comprises: a first groove portion, formed in base silicon of a silicon-on-insulator (SOI) substrate; a first optical waveguide structure, formed in top silicon of the SOI substrate; a second optical waveguide structure, which is connected to the first optical waveguide structure in a horizontal direction, extends in a first direction in the horizontal direction, and is located above the first groove portion; and a through groove, formed on both sides of the second optical waveguide structure in a second direction in the horizontal direction, the second direction being perpendicular to the first direction, the through groove being in communication with the first groove portion, and the refractive index of the material of the second optical waveguide structure being lower than the refractive index of the material of the first optical waveguide structure. The present application can improve the coupling efficiency of an optical field.

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Inventors:

WANG WEI (CN)
FANG QING (CN)
TU ZHIJUAN (CN)
ZENG YOUHONG (CN)
CAI YAN (CN)
YU MINGBIN (CN)

Application Number:

PCT/CN2019/096424

Publication Date:

January 07, 2021

Filing Date:

July 17, 2019

Export Citation:

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Assignee:

SHANGHAI INDUSTRIAL MTECHNOLOGY RES INSTITUTE (CN)

International Classes:

G02B6/12

Foreign References:

CN107561640A	2018-01-09
CN106405752A	2017-02-15
US10262984B1	2019-04-16

Attorney, Agent or Firm:

BEIJING ORIGINTELLIGENCE IP LAW FIRM (CN)

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