Title:
SILICON CARBIDE-TANTALUM CARBIDE COMPOSITE AND SUSCEPTOR
Document Type and Number:
WIPO Patent Application WO/2014/123036
Kind Code:
A1
Abstract:
Provided is a silicon carbide-tantalum carbide composite exhibiting excellent durability. This silicon carbide-tantalum carbide composite (1) is equipped with: a body (10) having at least one section of the surface layer thereof configured from a first silicon carbide layer (12); a tantalum carbide layer (20); and a second silicon carbide layer (13). The tantalum carbide layer (20) is positioned on the first silicon carbide layer (12). The second silicon carbide layer (13) is positioned between the tantalum carbide layer (20) and the first silicon carbide layer (12). The second silicon carbide layer (13) has a C/Si composition ratio of 1.2 or higher as measured by x-ray photoelectron spectroscopy. The second silicon carbide layer (13) also has a peak strength ratio (G/D) of carbon G-band to D-band of 1.0 or higher as measured by Raman spectroscopy.
Inventors:
SHINOHARA MASATO (JP)
Application Number:
PCT/JP2014/051821
Publication Date:
August 14, 2014
Filing Date:
January 28, 2014
Export Citation:
Assignee:
TOYO TANSO CO (JP)
International Classes:
C04B41/87; C04B41/89; C23C16/458; C30B25/12; C30B29/36; H01L21/683
Domestic Patent References:
| WO2006085635A1 | 2006-08-17 |
Foreign References:
| JP2011153045A | 2011-08-11 | |||
| JP2010030846A | 2010-02-12 | |||
| JP2006041358A | 2006-02-09 | |||
| JP2004084057A | 2004-03-18 | |||
| JP2013254853A | 2013-12-19 | |||
| JP2006060195A | 2006-03-02 | |||
| JP2010280948A | 2010-12-16 |
Other References:
See also references of EP 2955167A4
Attorney, Agent or Firm:
MIYAZAKI & METSUGI (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
Patent business corporation Miyazaki and table-of-contents patent firm (JP)
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