Title:
SILICON GAS INJECTOR AND METHOD OF MAKING
Document Type and Number:
WIPO Patent Application WO2006091413
Kind Code:
B1
Abstract:
A gas injector tube (40) usable in a batch thermal treatment oven including two silicon shells (54, 56) joined together with an adhesive formed of a fine silicon powder and a curable silica-forming agent, such as a spin-on glass, which is ultrasonically homogenized. The tube may have a gas outlet (52) on its distal end or be sealed with a silicon cap (86) and have side outlet holes (84) formed along its side. The silicon injector tube may be used in combination with a silicon tower and a silicon liner so that all bulk parts within the furnace hot zone are formed of silicon.
Inventors:
ZEHAVI RANAAN (US)
REYNOLDS REESE (US)
REYNOLDS REESE (US)
Application Number:
PCT/US2006/004991
Publication Date:
November 22, 2007
Filing Date:
February 13, 2006
Export Citation:
Assignee:
INTEGRATED MATERIALS INC (US)
ZEHAVI RANAAN (US)
REYNOLDS REESE (US)
ZEHAVI RANAAN (US)
REYNOLDS REESE (US)
International Classes:
C23C16/00; B32B37/00; F16K51/00
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