SILICON SOLAR CELL AND MANUFACTURING METHOD FOR SAME

WIPO Patent Application WO/2012/144420

A1

This silicon solar cell reduces absorption loss in an n-type silicon layer and ZnO, or similar, which is a transparent electrode, and has increased photoelectric current and improved efficiency. A silicon solar cell is formed by forming, on a substrate, a cell layer having at least one unit cell formed from a p-type silicon layer, an i-type silicon layer and an n-type silicon layer, and forming an electrode layer on one surface of the substrate-side of the cell layer and forming a facing electrode on one surface of the cell layer which faces the substrate. The silicon solar cell is characterised in that: a sheet layer containing i-type microcrystalline Si:H is provided between the i-type silicon layer and the n-type silicon layer, said sheet layer having a film thickness of 1-500nm and a crystallinity of at least 40%; the n-type silicon layer contains n-type SixM1-x:H (M is O, N or C, 0