Title:
SILICON TEXTURING COMPOSITION AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/069560
Kind Code:
A1
Abstract:
The present invention relates to a silicon texturing composition and a preparation method therefor and, more specifically, to a texturing composition comprising an alkali compound, a polysaccharide and a disaccharide, wherein, the content ratio of a carboxymethyl cellulose metal salt and a metal alginate in the polysaccharide is adjusted such that a more uniform surface shape is implemented when wet etching a silicon wafer.
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Inventors:
SONG MUN-HO (KR)
BAEK JIN-JOO (KR)
BAEK JIN-JOO (KR)
Application Number:
PCT/KR2016/011899
Publication Date:
April 27, 2017
Filing Date:
October 21, 2016
Export Citation:
Assignee:
OCI CO LTD (KR)
International Classes:
H01L31/0236; C01C1/00; C01D1/04; C07H3/04; C08B11/12; C08B37/00; H01L31/18
Foreign References:
| KR20150010558A | 2015-01-28 | |||
| KR20120136881A | 2012-12-20 | |||
| KR20060135028A | 2006-12-28 | |||
| KR20120092583A | 2012-08-21 | |||
| KR20120120073A | 2012-11-01 |
Attorney, Agent or Firm:
DAE-A INTELLECTUAL PROPERTY CONSULTING (KR)
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