Title:
SINGLE PHOTON DETECTION ELEMENT, ELECTRONIC DEVICE AND LIDAR DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/249462
Kind Code:
A1
Abstract:
The single photon detection element comprises: a substrate having a first surface and a second surface, which are arranged to be opposite to each other; and a plurality of plasmonic nano-patterns provided on the second surface, wherein the substrate includes: a highly doped region provided to be adjacent to the first surface; a substrate region provided between the highly doped region and the plurality of plasmonic nano-patterns; and a first well provided between the substrate region and the highly doped region, the first well having a first conductive type, and the highly doped region having a second conductive type that differs from the first conductive type.
Inventors:
LEE MYUNG JAE (KR)
LEE IN HO (KR)
LEE IN HO (KR)
Application Number:
PCT/KR2023/008787
Publication Date:
December 28, 2023
Filing Date:
June 23, 2023
Export Citation:
Assignee:
KOREA INST SCI & TECH (KR)
International Classes:
H01L31/107; G01S7/481; G01S17/931; H01L31/02; H01L31/0224
Foreign References:
| US20210296377A1 | 2021-09-23 | |||
| US20170199078A1 | 2017-07-13 | |||
| US20100019295A1 | 2010-01-28 | |||
| KR20170132467A | 2017-12-04 | |||
| JP2011009749A | 2011-01-13 |
Attorney, Agent or Firm:
JOOYON KRP INTELLECTUAL PROPERTY&LAW (KR)
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