Title:
SLIDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/222310
Kind Code:
A1
Abstract:
This sliding device 1, which performs a sliding process on the surface of an object W to be slid, has: a sliding part 4 that is provided with a sliding body 6 having a flat working surface 6A; a first driving mechanism 20 that regularly moves the sliding body 6 in parallel with the working surface 6A; and a second driving mechanism 30 that regularly moves the sliding part 4 in parallel with the working surface 6A and in a direction different from the movement by the first driving mechanism 20 while the first driving mechanism 20 moves the sliding body 6. Accordingly, a sliding object is uniformly supplied to the surface of the object to be slid, or the surface of the object to be slid is cleaned.
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Inventors:
SAITO TAKAYUKI (JP)
NISHIMOTO MASAHIRO (JP)
MITSUSHIMA IKUO (JP)
KANEKO MASAKI (JP)
NISHIMOTO MASAHIRO (JP)
MITSUSHIMA IKUO (JP)
KANEKO MASAKI (JP)
Application Number:
PCT/JP2020/018359
Publication Date:
November 05, 2020
Filing Date:
April 30, 2020
Export Citation:
Assignee:
DEXERIALS CORP (JP)
International Classes:
B05C5/02; B05C11/02; B05C19/04
Foreign References:
| JP2002066467A | 2002-03-05 | |||
| JP2000296368A | 2000-10-24 | |||
| JP2016111345A | 2016-06-20 | |||
| JP2005052741A | 2005-03-03 | |||
| JP2002134388A | 2002-05-10 |
Attorney, Agent or Firm:
TAJIME & TAJIME (JP)
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