Title:
SMALL FOOTPRINT CARRIER FRONT END LOADER
Document Type and Number:
WIPO Patent Application WO2001040085
Kind Code:
A9
Abstract:
An apparatus (52) for moving substrates between a loading of such substrates and a working chamber comprises frame (32) and a loading station connected to the frame and having at least two loading locations (31) wherein the plurality of substrates may be supplied or received in stacked form therein. A plurality of load locks (16) are provided at a second station located each directly oppositely of the locations (31) at the loading station and corresponding in number to the locations at the loading station. A substrate handling means (52) is disposed between the loading and the second stations for picking up and moving one or a plurality of ones of the substrates between the loading and second stations.
Inventors:
HOFMEISTER CHRISTOPHER
Application Number:
PCT/US2000/041922
Publication Date:
August 01, 2002
Filing Date:
November 06, 2000
Export Citation:
Assignee:
BROOKS AUTOMATION INC (US)
International Classes:
B65G49/07; H01L21/677; (IPC1-7): B65G49/05
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