Title:
SMART VISION ALIGNMENT SYSTEM AND SMART VISION ALIGNMENT METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2022/114340
Kind Code:
A1
Abstract:
The present invention relates to a system and a method for vision alignment. Provided according to the present invention are an artificial intelligence smart vision alignment system and a smart vision alignment method using same, the system being configured to determine and learn the state of the system during alignment such that an additional calibration operation is not required, the system comprising: a camera for capturing an image of a subject; a moving stage for changing the position of the subject; and a control unit for controlling the operation of the moving stage and the overall operation of the system, wherein the control unit is configured to execute a smart vision alignment program configured to: calculate a target and an initial position of the stage from an image obtained through the camera; change the position of the stage to recalculate the changed target and the changed position of the stage, respectively; calculate the positions of the camera and the stage on the basis of the respective calculated positions; and analyze and learn the position value distribution of the camera and the stage while repeating these processes, so that a coordinate system change in the corresponding alignment system is measured and an optimum vision calibration value is determined.
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Inventors:
LEE JAE JOON (KR)
LEE KYOUNG HA (KR)
LEE KYOUNG HA (KR)
Application Number:
PCT/KR2020/017477
Publication Date:
June 02, 2022
Filing Date:
December 02, 2020
Export Citation:
Assignee:
LEE JAE JOON (KR)
LEE KYOUNG HA (KR)
LEE KYOUNG HA (KR)
International Classes:
H01L21/68; G06N20/00; H01L21/67
Foreign References:
| KR20120041655A | 2012-05-02 | |||
| KR20200096134A | 2020-08-11 | |||
| KR20180006311A | 2018-01-17 | |||
| JP4165871B2 | 2008-10-15 | |||
| KR20200125397A | 2020-11-04 |
Attorney, Agent or Firm:
KIM, Jung Su (KR)
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