Title:
SOFT X-RAY ANTI-STATIC APPARATUS FOR VACUUM CHAMBER
Document Type and Number:
WIPO Patent Application WO/2015/056943
Kind Code:
A1
Abstract:
The present invention provides a soft X-ray anti-static apparatus for a vacuum chamber, comprising: a high voltage generation unit for generating a high voltage for generating a soft X-ray; a soft X-ray generation unit for generating the soft X-ray by using the high voltage, and outputting the generated soft X-ray to the outside; a flexible connection unit for connecting the high voltage generation unit with the soft X-ray generation unit and transmitting the high voltage to the soft X-ray generation unit; and a fixing unit provided at the soft X-ray generation unit and fixed to a predetermined subject being provided.
Inventors:
LEE DONG HOON (KR)
JUNG YONG CHUL (KR)
KIM SANG HYO (KR)
LEE SU YOUNG (KR)
JUNG YONG CHUL (KR)
KIM SANG HYO (KR)
LEE SU YOUNG (KR)
Application Number:
PCT/KR2014/009601
Publication Date:
April 23, 2015
Filing Date:
October 14, 2014
Export Citation:
Assignee:
SUNJE HI TEK CO LTD (KR)
International Classes:
H05F3/04; H01T23/00
Foreign References:
| KR100465346B1 | 2005-01-13 | |||
| KR100823990B1 | 2008-04-22 | |||
| JPH08124695A | 1996-05-17 | |||
| KR20010009566A | 2001-02-05 |
Attorney, Agent or Firm:
YOON, JAE SEUNG (KR)
윤재승 (KR)
윤재승 (KR)
Download PDF: