Title:
SOFT X-RAY MICROSCOPIC IMAGING DETECTOR
Document Type and Number:
WIPO Patent Application WO/2021/031936
Kind Code:
A1
Abstract:
A soft X-ray microscopic imaging detector, comprising a cavity (10), a fluorescence conversion screen (20), and a photoelectric conversion device (40). The cavity (10) comprises a first opening and a second opening. A reflective device (30) that reflects the light incident from the first opening to the second opening is provided in the cavity (10). A first angle is defined between the direction in which the light propagates from the first opening toward the reflective device (30) and the direction in which the light propagates from the reflective device (30) toward the second opening. The fluorescence conversion screen (20) is provided at the first opening. The photoelectric conversion device (40) is provided at the second opening. The photoelectric conversion device (40), the fluorescence conversion screen (20), and the cavity (10) form a closed space. The soft X-ray microscopic imaging detector avoids direct radiation of soft X-rays onto the photoelectric conversion device (40), improves the detection effect, prolongs the service life of the photoelectric conversion device (40), and is simple in structure and easy to implement.
Inventors:
ZHENG RUI (CN)
XIAO PENG (CN)
XIE QINGGUO (CN)
ZHONG SHENG (CN)
WANG WEIDONG (CN)
TANG JIANG (CN)
CHU QIAN (CN)
BAI XIANG (CN)
XIAO PENG (CN)
XIE QINGGUO (CN)
ZHONG SHENG (CN)
WANG WEIDONG (CN)
TANG JIANG (CN)
CHU QIAN (CN)
BAI XIANG (CN)
Application Number:
PCT/CN2020/108479
Publication Date:
February 25, 2021
Filing Date:
August 11, 2020
Export Citation:
Assignee:
RAYCAN TECHNOLOGY CO LTD SUZHOU (CN)
International Classes:
G01N23/04
Foreign References:
| CN110455835A | 2019-11-15 | |||
| CN211086146U | 2020-07-24 | |||
| CN102243318A | 2011-11-16 | |||
| CN207300923U | 2018-05-01 | |||
| CN208283314U | 2018-12-25 | |||
| JP2004138461A | 2004-05-13 |
Attorney, Agent or Firm:
KINGSRIGHT IP ATTORNEYS (CN)
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