Title:
SOLAR CELL AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/221510
Kind Code:
A1
Abstract:
The present disclosure provides a solar cell and a preparation method therefor. The preparation method comprises: forming a target amorphous silicon layer on a surface of a silicon wafer by using a preset process, and then subjecting same to annealing treatment to convert the target amorphous silicon layer into a target polycrystalline silicon layer. The preset process includes at least one cycle period. The cycle period includes: first depositing target amorphous silicon with a preset thickness, and then treating the target amorphous silicon by using hydrogen plasma, wherein the preset thickness is less than or equal to the thickness of the target amorphous silicon layer. The preparation method can effectively improve the crystallization rate of converting amorphous silicon into polycrystalline silicon, thereby facilitating improving the field passivation performance and contact performance of the cell.
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Inventors:
CHEN HAO (CN)
WANG XIUPENG (CN)
XING GUOQIANG (CN)
WANG XIUPENG (CN)
XING GUOQIANG (CN)
Application Number:
PCT/CN2022/141804
Publication Date:
November 23, 2023
Filing Date:
December 26, 2022
Export Citation:
Assignee:
TONGWEI SOLAR MEISHAN CO LTD (CN)
International Classes:
H01L31/18; H01L31/068
Foreign References:
| CN114864751A | 2022-08-05 | |||
| CN110459651A | 2019-11-15 | |||
| CN111200038A | 2020-05-26 |
Other References:
SARAVANAPRIYAN SRIRAMAN, SUMIT AGARWAL, ERAY S. AYDIL, DIMITRIOS MAROUDAS: "Mechanism of hydrogen-induced crystallization of amorphous silicon", NATURE, SPRINGER NATURE PUBLISHING AG, LONDON, vol. 418, 4 July 2002 (2002-07-04), LONDON , pages 62 - 65, XP093108771, ISSN: 1476-4687
SRIRAMAN SARAVANAPRIYAN, VALIPA MAYUR, AYDIL ERAY, MAROUDAS DIMITRIOS: "Hydrogen-induced crystallization of amorphous silicon thin films. I. Simulation and analysis of film postgrowth treatment with H2 plasmas", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 100, no. 5, 12 September 2006 (2006-09-12), 2 Huntington Quadrangle, Melville, NY 11747, pages 053514 - 053514, XP012089894, ISSN: 0021-8979, DOI: 10.1063/1.2229426
SRIRAMAN SARAVANAPRIYAN, VALIPA MAYUR, AYDIL ERAY, MAROUDAS DIMITRIOS: "Hydrogen-induced crystallization of amorphous silicon thin films. I. Simulation and analysis of film postgrowth treatment with H2 plasmas", JOURNAL OF APPLIED PHYSICS, AMERICAN INSTITUTE OF PHYSICS, 2 HUNTINGTON QUADRANGLE, MELVILLE, NY 11747, vol. 100, no. 5, 12 September 2006 (2006-09-12), 2 Huntington Quadrangle, Melville, NY 11747, pages 053514 - 053514, XP012089894, ISSN: 0021-8979, DOI: 10.1063/1.2229426
Attorney, Agent or Firm:
CHOFN INTELLECTUAL PROPERTY (CN)
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